Feedback-controlled MEMS force sensor for characterization of microcantilevers
- Creator: Moore, Steven Ian , Coskun, M. Bulut , Alan, Tuncay , Neild, Adrian , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2015
Zero displacement microelectromechanical force sensor using feedback control
- Creator: Coskun, M. Bulut , Moore, Steven , Moheimani, S. O. Reza , Neild, Adrian , Alan, Tuncay
- Resource Type: journal article
- Date: 2014